Johnsen-Rahbek effect

A simple theory of the Johnsen

https://iopscience.iop.org

The Johnsen-Rahbek effect is briefly described and the existing theories of the phenomenon are discussed. A model is derived expressing the attractive force ...

a) General setup of Johnsen

https://www.researchgate.net

This work aims to demonstrate and explain a nearly century old electrostatic haptic effect in human fingertips, which has since gone unreported. This effect, ...

Comparison of Coulombic and Johnsen

https://euvlsymposium.lbl.gov

• The empirical factor α represents the effect of the nonuniform distribution of charge on the interface surfaces. • A relationship for α as a function of ...

How does electrostatic fixation work?

https://protec-carrier.com

In Johnsen-Rahbek chucks a current runs through the dielectric and leads to strong forces in direct contact with the substrate material. The ...

Johnsen–Rahbek effect

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Physical Modeling and Characteristics of a Johnsen ...

https://www.scientific.net

Generally, a Johnsen-Rahbek (J-R) type electrostatic chuck (ESC) generates higher attractive force than a Coulomb type ESC. Attractive force in a J-R type ESC ...

Prediction of residual clamping force for Coulomb type and ...

https://journals.sagepub.com

A simple theory of the Johnsen-Rahbek effect. J Phys D: Appl Phys 1969; 2: 325–332. 312. Proc IMechE Part C: J Mechanical Engineering Science ...

Wafer dependence of Johnsen–Rahbek type electrostatic ...

https://www.researchgate.net

A Johnsen–Rahbek (J-R type) type electrostatic chuck (ESC) was found to be more sensitive to wafer conditions than classic ESC, ...

雙極式靜電吸盤測試環境及吸附力之探討

http://ntur.lib.ntu.edu.tw

... material)，半導體材料其產. 生的靜電吸附壓力效應，稱為Johnson Rahbek effect，其吸附力為：. (. ) 2. 2. 2. 1. 2. 1. │. ⎠. ⎞. │. ⎝. ⎛. −. −. +. │. ⎠. ⎞.